2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan

[A-1-3]Novel Strained-Si Substrate Technology for Transistor Performance Enhancement

Chun-Chieh Lin、Chao-Hsiung Wang、Chung-Hu Ge、Chien-Chao Huang、Tien-Chih Chang、Liang-Gi Yao、Shih-Chang Chen、Mong-Song Liang、Fu-Liang Yang、Yee-Chia Yeo、Chenming Hu(1.Taiwan Semiconductor Manufacturing Company, Ltd.)
https://doi.org/10.7567/SSDM.2002.A-1-3
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