2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan

[B-1-1]Critical Materials Issues for High-k Gate Dielectric Integration

Robert M. Wallace(1.University of North Texas, Department of Materials Science)
https://doi.org/10.7567/SSDM.2002.B-1-1
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