2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan

[B-1-4]Impact of Hf metal pre-deposition in CVD- and PVD-HfO2 dielectrics

Kazuhiko Yamamoto、Masayuki Asai、Shigenori Hayashi、Sadayoshi Horii、Masaaki Niwa、Hironobu Miya(1.ULSI Process Technology Development Center, Matsushita Electric Industrial Co., Ltd.、2.Semiconductor equipment system laboratory, Hitachi Kokusai Electric Inc.)
https://doi.org/10.7567/SSDM.2002.B-1-4
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