2002 International Conference on Solid State Devices and Materials
2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
[B-2-2]Structure control of periodic porous silica film for low-k application
Kazuhiro Yamada、Yoshiaki Oku、Nobuhiro Hata、Shozo Takada、Takamaro Kikkawa(1.MIRAI Project, Association of Super-Advanced Electronics Technology (ASET)、2.MIRAI Project, Advanced Semiconductor Research center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST)、3.Research Center for Nanodevices and Systems, Hiroshima University)
