2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan

[B-2-5]Influence of Surface Oxide of Sputtered TaN Film on Displacement Plating of Cu

Zenglin Wang、Hiroyuki Sakaue、Shoso Shingubara、Talayuki Takahagi(1.Graduate School of Advanced Science of Matter, Hiroshima University)
https://doi.org/10.7567/SSDM.2002.B-2-5
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