2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan

[C-1-2]A Novel TEM/AFM/STM Microscopy for Cu Nano-Wire Electromigration

Satoru FUJISAWA、Takamaro KIKKAWA、Tokushi KIZUKA(1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST)、2.Research Center for Nanodevices and Systems, Hiroshima University、3.Institute of Materials Science, University of Tsukuba)
https://doi.org/10.7567/SSDM.2002.C-1-2
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