2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan

[C-1-3]Lattice Strain in Scaled Devices Revealed by Using Convergent-Beam Electron Diffraction

Akio Toda、Kensuke Okonogi、Nobuyuki Ikarashi、Haruhiko Ono(1.Silicon Systems Research Laboratories, NEC Corporation、2.Device Development Department, Device Development Division, Elpida Memory Inc.)
https://doi.org/10.7567/SSDM.2002.C-1-3
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