2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan

[C-1-5]Microscopic identification of implantation damage centers in Si ULSIs

Takahide Umeda、Yasunori Mochizuki(1.Silicon Systems Research Lab., NEC Corporation)
https://doi.org/10.7567/SSDM.2002.C-1-5
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