2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan

[C-2-1]High-Resolution Compositional Profiling of High-к Gate Stack Structures

T. Nishimura、D. Starodub、T. Gustafsson、E. Garfunkel(1.Departments of Chemistry and Physics, Rutgers University)
https://doi.org/10.7567/SSDM.2002.C-2-1
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