2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan

[C-2-5]New Method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement

Koji Kita、Masashi Sasagawa、Kentaro Kyuno、Akira Toriumi(1.Department of Materials Science, Graduate School of Engineering, The University of Tokyo)
https://doi.org/10.7567/SSDM.2002.C-2-5
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