2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan
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International Conference on Solid State Devices and Materials
2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜9月19日Nagoya Congress Center, Nagoya, Japan

[D-1-5]Notable Advantages of High Performance SOI Technology beyond 90nm Generation

Hee-Sung Kang、Chang-Bong Oh、Young-Wug Kim、Kyung-Soo Kim、Kwang-Pyuk Suh(1.Technology Development PJT, System LSI Division, Semiconductor Business, Samsung Electronics Co. Ltd.)
https://doi.org/10.7567/SSDM.2002.D-1-5
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