2004 International Conference on Solid State Devices and Materials

2004 International Conference on Solid State Devices and Materials

2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2004 International Conference on Solid State Devices and Materials

2004 International Conference on Solid State Devices and Materials

2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan

[A-1-4]Dopant Profile Design Methodology for 65 nm Generation via Inverse Modeling

Takuji Tanaka、Mitsuru Yamaji、Hiroyuki Kanata、Yukio Tagawa、Shigeo Satoh、Toshihiro Sugii(1.FUJITSU Ltd.)
https://doi.org/10.7567/SSDM.2004.A-1-4
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