2004 International Conference on Solid State Devices and Materials

2004 International Conference on Solid State Devices and Materials

2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2004 International Conference on Solid State Devices and Materials

2004 International Conference on Solid State Devices and Materials

2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan

[A-5-1]Successful CMOS Operation of Dopant-Segregation Schottky Barrier Transistors (DS-SBTs)

A. Kinoshita、Y. Tsuchiya、A. Yagishita、K. Uchida、J. Koga(1.Advanced LSI Technology Laboratory, Corporate R&D Center, Toshiba Corporation、2.Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation)
https://doi.org/10.7567/SSDM.2004.A-5-1
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