2004 International Conference on Solid State Devices and Materials
2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan
[A-5-3]Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method
Md. Shofiqul Islam、Hiroshi Ishino、Takeshi Kawano、Hidekuni Takao、Kazuaki Sawada、Makoto Ishida(1.Department of Electrical and Electronic Engineering Toyohashi University of Technology)
