2004 International Conference on Solid State Devices and Materials

2004 International Conference on Solid State Devices and Materials

2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan
戻る
International Conference on Solid State Devices and Materials
2004 International Conference on Solid State Devices and Materials

2004 International Conference on Solid State Devices and Materials

2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan

[A-7-1]Investigation of Degradation model for Ultra -thin Gate Dielectrics

Hiroko Mori、Hideo Ehara、Naoyoshi Tamura、Chioko Kaneta、Hideya Matsuyama、Ken Shono(1.FUJITSU LSI Quality Assurance Div.、2.FUJITSU Laboratories Ltd.)
https://doi.org/10.7567/SSDM.2004.A-7-1
PDFダウンロードPDFダウンロード
戻る