2004 International Conference on Solid State Devices and Materials
2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan
[A-7-2]Thermal Stability of Metal Gate Work Functions
H.Y. Yu、Chi Ren、J.F. Kang、Yee-Chia Yeo、Daniel S.H. Chan、M.F. Li、Dim-Lee Kwong(1.Silicon Nano Device Lab, Dept. of Electrical & Computer Eng., National University of Singapore、2.Institute of Microelectronics、3.Dept. of ECE, The University of Texas)
