[A-9-3]Quantitative Understanding of Mobility Degradation in High Effective Electric Field Region in MOSFETs with Ultra-thin Gate Oxides
Takamitsu Ishihara、Junji Koga、Shin-ichi Takagi(1.Advanced LSI Technology Laboratory, Research and Development Center, Toshiba Corporation、2.Department of Frontier Informatics, Graduate School of Frontier Science, The University of Tokyo)
