2004 International Conference on Solid State Devices and Materials

2004 International Conference on Solid State Devices and Materials

2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2004 International Conference on Solid State Devices and Materials

2004 International Conference on Solid State Devices and Materials

2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan

[B-2-1]Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano、Mizuhisa Nihei、Shintaro Sato、Akio Kawabata、Daiyu Kondo、Mari Ohfuti、Naoki Yokoyama(1.Fujitsu Limited、2.Nanotechnology Research Center, Fujitsu Laboratories Ltd.)
https://doi.org/10.7567/SSDM.2004.B-2-1
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