2004 International Conference on Solid State Devices and Materials
2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
2004年9月14日〜9月17日Tower Hall Funabori, Tokyo, Japan
[B-2-5]A Metallurgical Prescription Suppressing Stress-induced Voiding (SIV) in Cu lines
Mari Abe、Naoya Furutake、Shinobu Saito、Naoya Inoue、Yoshihiro Hayashi(1.System Devices Research Laboratories, NEC Corporation)
