2005 International Conference on Solid State Devices and Materials

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜9月15日International Conference Center Kobe, Kobe, Japan
戻る
International Conference on Solid State Devices and Materials
2005 International Conference on Solid State Devices and Materials

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜9月15日International Conference Center Kobe, Kobe, Japan

[A-1-1]Current Status and Addressing the Challenges of Hf-based Gate Stack toward 45nm-LSTP Application

M. Niwa、R. Mitsuhashi、K. Yamamoto、S. Hayashi、Y. Harada、A. Rothchild、T. Hoffmann、S. Kubicek、S. De Gendt、M. Heyns、S. Biesemans、M. Kubota(1.Matsushita assignee at IMEC、2.Semiconductor Company, Matsushita Electric Ind.,Co., Ltd.、3.IMEC vzw)
https://doi.org/10.7567/SSDM.2005.A-1-1
PDFダウンロードPDFダウンロード
戻る