2005 International Conference on Solid State Devices and Materials

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜9月15日International Conference Center Kobe, Kobe, Japan
戻る
International Conference on Solid State Devices and Materials
2005 International Conference on Solid State Devices and Materials

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜9月15日International Conference Center Kobe, Kobe, Japan

[A-5-2]Local Current Leakage Characterization in La2O3-Al2O3 Composite Films by Conductive Atomic Force Microscopy

Akiyoshi Seko、Toshifumi Sago、Mitsuo Sakashita、Akira Sakai、Masaki Ogawa、Shigeaki Zaima(1.Graduate School of Engineering, Nagoya University、2.Center for Cooperative Research in Advanced Science & Technology, Nagoya University)
https://doi.org/10.7567/SSDM.2005.A-5-2
PDFダウンロードPDFダウンロード
戻る