2005 International Conference on Solid State Devices and Materials

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜9月15日International Conference Center Kobe, Kobe, Japan
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International Conference on Solid State Devices and Materials
2005 International Conference on Solid State Devices and Materials

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜9月15日International Conference Center Kobe, Kobe, Japan

[A-7-1]Atomic Layer Deposition of PMOS Metal Gate Electrodes and High-k/Metal Interface Reactions for Advanced Device Applications

G.N. Parsons、K.J. Park、D.B. Terry(1.Department of Chemical and Biomolecular Engineering North Carolina State University)
https://doi.org/10.7567/SSDM.2005.A-7-1
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