2005 International Conference on Solid State Devices and Materials

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜9月15日International Conference Center Kobe, Kobe, Japan
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International Conference on Solid State Devices and Materials
2005 International Conference on Solid State Devices and Materials

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜9月15日International Conference Center Kobe, Kobe, Japan

[A-8-2]Ta-based metal gates (Ta, TaBx, TaNx and TaCx) -Modulated Work Function and Improved Thermal Stability-

Reika Ichihara、Yoshinori Tsuchiya、Yuuichi Kamimuta、Masato Koyama、Akira Nishiyama(1.Advanced LSI Technology Laboratory, Toshiba Corp.)
https://doi.org/10.7567/SSDM.2005.A-8-2
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