[A-1-3]Counter-doping as a solution for multi threshold voltage on FDSOI MOSFETs with a single TiN/HfO2 gate stack
C. Buj-Dufournet1、F. Andrieu1、O. Faynot1、O. Weber1、F. Allain1、L. Tosti1、C. Fenouillet-Béranger1、D. Lafond1、S. Deleonibus1(1.CEA-LETI/MINATEC)
