2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan
戻る
International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan

[A-5-2]A New Diamond-like Carbon (DLC) Ultra-High Stress Liner Technology for Direct Deposition on P-Channel Field-Effect Transistors

B. Liu1、M. C. Yang2、Y. C. Yeo1(1.National Univ. of Singapore(Singapore)、2.Data Storage Inst.(Singapore))
https://doi.org/10.7567/SSDM.2009.A-5-2
PDFダウンロードPDFダウンロード
戻る