2009 International Conference on Solid State Devices and Materials
2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan
2009 International Conference on Solid State Devices and Materials
2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan
[B-1-2]Three-Dimensional Visualization Technique for Crystal Defects in High Performance CMOS Devices with Embedded SiGe-Source/Drain
S. Kudo1、N. Nakanishi1、Y. Hirose1、K. Sato1、T. Yamashita1、H. Oda1、K. Kashihara1、N. Murata1、T. Katayama1、K. Asayama1、J. Komori1、E. Murakami1(1.Renesas Tech. Corp.)
