2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan
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International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan

[B-1-4]Impact of Si Oxidation States on Dipole Layer at HfO2/Si Interface

N. Miyata1,2、Y. Abe2、T. Yasuda1(1.AIST(Japan)、2.Musashi Inst. Of Tech.(Japan))
https://doi.org/10.7567/SSDM.2009.B-1-4
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