2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan
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International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan

[B-1-5]Evaluation of Effective Work Function of Pt on Bi-layer High-k/SiO2 Stack Structure using by Backside X-ray Photoelectron Spectroscopy

T. Mori1、A. Ohta1、H. Murakami1、S. Higashi1、S. Miyazaki1(1.Hiroshima Univ.)
https://doi.org/10.7567/SSDM.2009.B-1-5
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