2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan
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International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan

[B-1-6]Molecular Dynamics Study of Oxidation Process with SiO emission and incorporation into the Si/SiO2 System

N. Takahashi1、T. Yamasaki1、C. Kaneta1(1.Fujitsu Labs. Ltd.)
https://doi.org/10.7567/SSDM.2009.B-1-6
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