2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan
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International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜10月9日Sendai Kokusai Hotel, Miyagi, Japan

[B-4-3]Influence of Post Cap-layer Deposition Annealing Temperature on MgO Diffusion in High-k/IFL Stacks

T. Morooka1、T. Matsuki1、T. Nabatame1、J. Yugami1、K. Ikeda1、Y. Ohji1(1.Selete)
https://doi.org/10.7567/SSDM.2009.B-4-3
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