[AL-6-5]Effects of Substrate Defects on the Gate Leakage Current of AlGaN/GaN Heterojunction FETs Fabricated on Na Flux Bulk GaN
R. Hasegawa1、N. Yafune1、H. Tokuda1、Y. Mori3、H. Amano4、M. Kuzuhara1(1.Univ. of Fukui、2.Sharp Corp.、3.Osaka Univ.、4.Nagoya Univ. , Japan)
