2013 International Conference on Solid State Devices and Materials

2013 International Conference on Solid State Devices and Materials

2013年9月24日〜9月27日Hilton Fukuoka Sea Hawk, Fukuoka, Japan
戻る
International Conference on Solid State Devices and Materials
2013 International Conference on Solid State Devices and Materials

2013 International Conference on Solid State Devices and Materials

2013年9月24日〜9月27日Hilton Fukuoka Sea Hawk, Fukuoka, Japan

[A-2-5]Fluorine ion implantation optimization in Saddle-Fin array devices for sub-40-nm DRAM technology

K.L. Chiang1,2、W.P. Lee1,2、C.C. Lee1、C.S. Sung1、C.K. Wei1,2、C.M. Yang1,2、J.C. Wang2、P. Kao1、C.Y. Lee2、H.H. Chen1、C.Y. Hsiao1、C.S. Lai2(1.Chang Gung Univ.、2.Inotera Memories Inc. (Taiwan))
https://doi.org/10.7567/SSDM.2013.A-2-5
PDFダウンロードPDFダウンロード
戻る