2013 International Conference on Solid State Devices and Materials

2013 International Conference on Solid State Devices and Materials

2013年9月24日〜9月27日Hilton Fukuoka Sea Hawk, Fukuoka, Japan
International Conference on Solid State Devices and Materials
2013 International Conference on Solid State Devices and Materials

2013 International Conference on Solid State Devices and Materials

2013年9月24日〜9月27日Hilton Fukuoka Sea Hawk, Fukuoka, Japan

[A-5-1]Optimum Crystal Orientation in Rhombohedral PZT Films for FeRAM Application

H. Funakubo1、Y. Ehara1、T. Oikawa1、T. Yamada2,3、S. Utsugi1(1.Tokyo Inst. Tech.、2.Nagoya Univ.、3.JST (Japan))
https://doi.org/10.7567/SSDM.2013.A-5-1