2015 International Conference on Solid State Devices and Materials

2015 International Conference on Solid State Devices and Materials

2015年9月27日〜9月30日Sapporo Convention Center, Sapporo, Japan
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International Conference on Solid State Devices and Materials
2015 International Conference on Solid State Devices and Materials

2015 International Conference on Solid State Devices and Materials

2015年9月27日〜9月30日Sapporo Convention Center, Sapporo, Japan

[A-5-3]Crystallinity Improvement of Ge Waveguides Fabricated by Epitaxial Lateral Overgrowth and Chemical Mechanical Polishing

○K. Oda1, T. Okumura1, J. Kasai1, S. Kako2, S. Iwamoto2, Y. Arakawa2(1.Hitachi Ltd., 2.Univ. of Tokyo(Japan))
https://doi.org/10.7567/SSDM.2015.A-5-3
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