2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日
International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日

[A-1-04]Effect of Gate Stack Material on Performance and Low-frequency Noise in Si p-MOSFETs at Cryogenic Temperature: Comparison of SiO2/Poly-Si Gate and High-k/Metal Gate

〇Hiroshi Oka1、Takumi Inaba1、Ryo Hashimoto1、Takahiro Mori1(1.AIST)
https://doi.org/10.7567/SSDM.2021.A-1-04