[A-1-06]Effect of Percolation Path on Temperature Dependence of Threshold Voltage Variability in Bulk MOSFETs
〇TOMOKO MIZUTANI1、KIYOSHI TAKEUCHI1、TAKUYA SARAYA1、HIROSHI OKA2、TAKAHIRO MORI2、MASAHARU KOBAYASHI1,3、TOSHIRO HIRAMOTO1(1.IIS, Univ. of Tokyo、2.AIST、3.d.lab, Univ. of Tokyo)
