2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日
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International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日

[A-4-03]Anisotropic Strain States in Extremely-Thin Body Ge-on-Insulator p-type MOSFET Observed by Oil-Immersion Raman Spectroscopy

〇Ryo Yokogawa1,2、Chia-Tsong Chen3、Kasidit Toprasertpong3、Mitsuru Takenaka3、Shinichi Takagi3、Atsushi Ogura1,2(1.Meiji Univ.、2.MREL、3.Univ. of Tokyo)
https://doi.org/10.7567/SSDM.2021.A-4-03
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