2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日
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International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日

[A-5-02]Control of HfO2 Crystallizing Phase in UV Nanosecond Pulsed Laser Annealing

〇Toshiyuki Tabata1、Pablo Acosta Alba2、Jérôme Richy2、Marianne Coig2、Pierre-Edouard Raynal1、Fabien Rozé1、Sebastien Kerdilès2(1.Laser Systems & Solutions of Europe (LASSE)、2.Univ. Grenoble Alpes, CEA-LETI)
https://doi.org/10.7567/SSDM.2021.A-5-02
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