2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日
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International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日

[A-6-02] Potential benefits of S/D HDD activation by melt laser annealing in 3D-integrated top-tier FDSOI FETs

Anne Vandooren1、〇Toshiyuki Tabata2、Pierre Eyben1、Erik Roseel1、Andriy Hikavyy1、Karim Huet2、Fulvio Mazzamuto2、Eugenio Dentoni Litta1、Naoto Horiguchi1(1.imec、2.Laser Systems & Solutions of Europe (LASSE))
https://doi.org/10.7567/SSDM.2021.A-6-02
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