2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日
戻る
International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日

[A-6-03]Impact of the buried oxide thickness in UV laser heated 3D stacks

Pierre Morin1、〇Toshiyuki Tabata2、Fabien Rozé 2、Mohamed Saib 1、Hilde Thielens 1、Louis Thuries 2、Karim Huet2、Fulvio Mazzamuto 2(1.imec、2.Laser Systems & Solutions of Europe (LASSE))
https://doi.org/10.7567/SSDM.2021.A-6-03
PDFダウンロードPDFダウンロード
戻る