2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日
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International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日

[A-6-08] TCAD Simulation for Capture / Emission of Carriers by Traps in SiN: Trap-Assisted Tunneling Model Extended for Capture of Carriers Injected via Fowler-Nordheim Tunneling

〇Michiru Hogyoku1、Yoshinori Yokota1、Kazuhito Nishitani1(1.KIOXIA Corp.)
https://doi.org/10.7567/SSDM.2021.A-6-08
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