2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日
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International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日

[A-6-10]Contactless Characterization of SiOx/c-Si by FTIR and μ-PCD applied to pMOS Devices

〇Mickael Lozach1、Sommawan Khumpuang1,2、Shiro Hara1,2(1.Minimal Fab Promoting Organization、2.National Institute of Advanced Industrial Science and Technology (AIST))
https://doi.org/10.7567/SSDM.2021.A-6-10
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