2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日
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International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日

[A-7-01 (Invited)] Enablement of Next Generation Nanosheet Technology

〇Nicolas Loubet1、Curtis Durfee 1、Julien Frougier1、Shogo Mochizuki1、Maruf Bhuiyan 1、Ruqiang Bao 1、Andrew Greene1、Eric Miller1、Indira Seshadri1(1.IBM Research)
https://doi.org/10.7567/SSDM.2021.A-7-01
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