2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日
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International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

2021年9月6日〜9月9日

[A-7-05]Improvement of performance of Si0.8Ge0.2/SOI p-FinFETs by ultrathin Y2O3 gate stacks with TMA treatment

〇Tsung-En Lee1、Shao-Tse Huang2、Chiung-Yi Yang2、Kasidit Toprasertpong1、Mitsuru Takenaka1、Yao-Jen Lee2、Shinichi Takagi1(1.Univ. of Tokyo、2.Taiwan Semiconductor Res. Inst.)
https://doi.org/10.7567/SSDM.2021.A-7-05
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