2021 International Conference on Solid State Devices and Materials
2021年9月6日〜9月9日
2021 International Conference on Solid State Devices and Materials
2021年9月6日〜9月9日
[A-7-06] Attainment of Low Dit and Reliable High-Ge-Content Si1-xGex Gate Stacks via Low-Temperature Grown Ultra-Thin Epitaxial Si
〇HsienWen Wan1、Yi-Ting Cheng1、Chao-Kai Cheng1、Yu-Jie Hong1、Tien-Yu Chu1、Chien-Ting Wu2、Jueinai Kwo3、Minghwei Hong1(1.National Taiwan Univ.、2.Taiwan Semiconductor Res. Inst.、3.National Tsing Hua Univ.)
