International Conference on Solid State Devices and Materials

Au-InGaAs, which is an alloy of Au and InGaAs, was evaluated for fabricating a plasmonic InGaAs waveguide photodetector (PD). Spectroscopic ellipsometry revealed that Au-InGaAs has a negative permittivity, similar to Au, enabling a surface plasmon polariton at the Au-InGaAs/InGaAs interface. Using the measured permittivity, we numerically confirmed the existence of the plasmonic mode in the Au-InGaAs/InGaAs/Au-InGaAs waveguide, revealing the feasibility of a plasmonic InGaAs waveguide PD using alloy formation.