Presentation Information

[Tu-P-17]In Situ Stoichiometric Evaluation of Sputtered Li3PO4 Electrolyte Thin Films via Optical Emission Spectroscopy

*Susumu Imashuku1 (1. Shimane University (Japan))

Keywords:

All-solid-state thin-film batteries,Optical emission spectroscopy,Real-time compositional analysis,Sputtering deposition


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