Presentation Information
[Tu-P-17]In Situ Stoichiometric Evaluation of Sputtered Li3PO4 Electrolyte Thin Films via Optical Emission Spectroscopy
*Susumu Imashuku1 (1. Shimane University (Japan))
Keywords:
All-solid-state thin-film batteries,Optical emission spectroscopy,Real-time compositional analysis,Sputtering deposition
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