[xc7LS2E1] We-Poster-B

[We-P-30] Van der Waals-Like HZO/In₂O₃ Interfaces for Reconfigurable Ferroelectric Logic

*Hao-Tse Lee¹, Chang-Chang Huang¹, Bo-Cia Chen^2,3, Rahul *^2,3, Yung-Chi Su⁴, Chien-Ting Wu⁵, Chien-Chung Hsu⁵, Yen-Lin Huang⁴, Jan-Chi Yang^2,3, Der-Hsien Lien¹ (1. Institute of Electronics, National Yang Ming Chiao Tung University (Taiwan), 2. Department of Physics, National Cheng Kung University (Taiwan), 3. Center for Quantum Frontiers of Research & Technology (QFort), National Cheng Kung University (Taiwan), 4. Department of Materials Science and Engineering, National Yang Ming Chiao Tung University (Taiwan), 5. Taiwan Semiconductor Research Institute (TSRI) (Taiwan))

Keywords:

transferable ferroelectrics,HZO,high-κ oxide transistors,logic-in-memory computation,large-area transfer