[MdJZ7QKR] Tu-Poster-A

[Tu-P-24] Monolithic 3D CFETs with Reversible Stacking for Logic and Memory Integration

*Chun-Chieh Lu¹, Tzu-Ting Weng¹, Tsung-Te Chou³, Yu-Lun Chueh², Der-Hsien Lien¹ (1. Institute of Electronics, National Yang Ming Chiao Tung University (Taiwan), 2. Department of Materials Science and Engineering, National Tsing Hua University (Taiwan), 3. National Center for Instrumentation Research, National Institutes of Applied Research (Taiwan))

Keywords:

Monolithic 3D integration,n-type In2O3,p-type Te,Complementary field-effect transistors (CFETs)