Solid-state, Fiber Lasers & Advanced Laser Materials

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[ATu1-01] Fabrication of AlGaN-based vertical UV-B devices using substrate exfoliation with heated and pressurized water

*Eri Matsubara¹, Toma Nishibayashi¹, Ryosuke Kondo¹, Ryoya Yamada¹, Yoshinori Imoto¹, Koki Hattori¹, Sho Iwayama¹, Motoaki Iwaya¹, Tetsuya Takeuchi¹, Satoshi Kamiyama¹, Hideto Miyake² (1. Meijo University, 2. Mie University)

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Paper will be available on August 28, 2023 (Japan Standard Time/GMT+9:00).